LIGA-based microsystem manufacturing:the electrochemistry of through-mold depostion and material properties.

Kelly, James J. (Sandia National Laboratories, Livermore, CA) ; Goods, Steven Howard (Sandia National Laboratories, Livermore, CA)

Sandia National Laboratories

关键词: Nanostructures;    Electrochemistry.;    Liga.;    36 Materials Science;    Microelectronics;   

DOI  :  10.2172/876336
RP-ID  :  SAND2005-2537
RP-ID  :  AC04-94AL85000
RP-ID  :  876336

美国|英语

来源: UNT Digital Library

【 摘 要 】

The report presented below is to appear in ''Electrochemistry at the Nanoscale'', Patrik Schmuki, Ed. Springer-Verlag, (ca. 2005). The history of the LIGA process, used for fabricating dimensional precise structures for microsystem applications, is briefly reviewed, as are the basic elements of the technology. The principal focus however, is on the unique aspects of the electrochemistry of LIGA through-mask metal deposition and the generation of the fine and uniform microstructures necessary to ensure proper functionality of LIGA components. We draw from both previously published work by external researchers in the field as well as from published and unpublished studies from within Sandia.