Development of highly integrated magetically and electrostatically actuated micropumps : LDRD 64709 final report.

Sosnowchik, Brian D. (Pennsylvania State University, University Park, PA) ; Galambos, Paul C. ; Hendrix, Jason R. (Florida State University, Tallahassee, FL) ; Zwolinski, Andrew (Florida State University, Tallahassee, FL)

Sandia National Laboratories

关键词: Torque Micromachining-Technological Innovations;    Pumping;    Electrochemical Apparatus.;    Miniaturization;    Actuators;   

DOI  :  10.2172/918219
RP-ID  :  SAND2003-4674
RP-ID  :  AC04-94AL85000
RP-ID  :  918219

美国|英语

来源: UNT Digital Library

【 摘 要 】

The pump and actuator systems designed and built in the SUMMiT{trademark} process, Sandia's surface micromachining polysilicon MEMS (Micro-Electro-Mechanical Systems) fabrication technology, on the previous campus executive program LDRD (SAND2002-0704P) with FSU/FAMU (Florida State University/Florida Agricultural and Mechanical University) were characterized in this LDRD. These results demonstrated that the device would pump liquid against the flow resistance of a microfabricated channel, but the devices were determined to be underpowered for reliable pumping. As a result a new set of SUMMiT{trademark} pumps with actuators that generate greater torque will be designed and submitted for fabrication. In this document we will report details of dry actuator/pump assembly testing, wet actuator/pump testing, channel resistance characterization, and new pump/actuator design recommendations.