Integrated Mirco-Machined Hydrogen Gas Sensors

DiMeo, Frank, Jr. ; Chen, Ing-shin

ATMI, Inc

关键词: Viability Hydrogen Sensors;    Testing;    Hydrides;    08 Hydrogen;    Hydrogen Sensors;   

DOI  :  10.2172/861437
RP-ID  :  none
RP-ID  :  FC36-99GO10451
RP-ID  :  861437

美国|英语

来源: UNT Digital Library

【 摘 要 】

The widespread use of hydrogen as both an industrial process gas and an energy storage medium requires fast, selective detection of hydrogen gas. This report discusses the development of a new type of solid-state hydrogen gas sensor that couples novel metal hydride thin films with a MEMS (Micro-Electro-Mechanical System) structure known as a micro-hotplate. In this project, Micro-hotplate structures were overcoated with engineered multilayers that serve as the active hydrogen-sensing layer. The change in electrical resistance of these layers when exposed to hydrogen gas was the measured sensor output. This project focused on achieving the following objectives: (1) Demonstrating the capabilities of micro-machined H2 sensors; (2) Developing an understanding of their performance; (3) Critically evaluating the utility and viability of this technology for life safety and process monitoring applications. In order to efficiently achieve these objectives, the following four tasks were identified: (1) Sensor Design and Fabrication; (2) Short Term Response Testing; (3) Long Term Behavior Investigation; (4) Systems Development. Key findings in the project include: The demonstration of sub-second response times to hydrogen; measured sensitivity to hydrogen concentrations below 200 ppm; a dramatic improvement in the sensor fabrication process and increased understanding of the processing properties and performance relationships of the devices; the development of improved sensing multilayers; and the discovery of a novel strain based hydrogen detection mechanism. The results of this program suggest that this hydrogen sensor technology has exceptional potential to meet the stringent demands of life safety applications as hydrogen utilization and infrastructure becomes more prevalent.