Micromirror Arrays for Adaptive Optics

Carr, E.J.

Lawrence Livermore National Laboratory

关键词: Mirrors;    Actuators;    Bonding;    42 Engineering;    Design;   

DOI  :  10.2172/793692
RP-ID  :  UCRL-ID-140057
RP-ID  :  W-7405-Eng-48
RP-ID  :  793692

美国|英语

来源: UNT Digital Library

【 摘 要 】

The long-range goal of this project is to develop the optical and mechanical design of a micromirror array for adaptive optics that will meet the following criteria: flat mirror surface ({lambda}/20), high fill factor (> 95%), large stroke (5-10 {micro}m), and pixel size {approx}-200 {micro}m. This will be accomplished by optimizing the mirror surface and actuators independently and then combining them using bonding technologies that are currently being developed.