Photonics Integration Devices and Technologies

VAWTER, GREGORY A. ; LIN, SHAWN-YU ; SULLIVAN, CHARLES T. ; ZUBRZYCKI, WALTER J. ; CHOW, WENG W. ; ALLERMAN, ANDREW A. ; WENDT, JOEL R.

Sandia National Laboratories

关键词: Waveguides;    Miniaturization;    Etching;    Oxidation;    Photoelectric Effect;   

DOI  :  10.2172/780313
RP-ID  :  SAND2001-0897
RP-ID  :  AC04-94AL85000
RP-ID  :  780313

美国|英语

来源: UNT Digital Library

【 摘 要 】

We have used selective AlGaAs oxidation, dry-etching, and high-gain semiconductor laser simulation to create new in-plane lasers with interconnecting passive waveguides for use in high-density photonic circuits and future integration of photonics with electronics. Selective oxidation and doping of semiconductor heterostructures have made vertical cavity surface emitting lasers (VCSELs) into the world's most efficient low-power lasers. We apply oxidation technology to improve edge-emitting lasers and photonic-crystal waveguides, making them suitable for monolithic integrated microsystems. Two types of lasers are investigated: (1) a ridge laser with resonant coupling to an output waveguide; (2) a selectively-oxidized laser with a low active volume and potentially sub-milliAmp threshold current. Emphasis is on development of high-performance lasers suited for monolithic integration with photonic circuit elements.