Wet-Etch Figuring Optical Figuring by Controlled Application of Liquid Etchant

Britten, J

Lawrence Livermore National Laboratory

关键词: Optical Properties;    Process Control;    Etching;    36 Materials Science;    Automation;   

DOI  :  10.2172/15013516
RP-ID  :  UCRL-ID-142529
RP-ID  :  W-7405-ENG-48
RP-ID  :  15013516

美国|英语

来源: UNT Digital Library

【 摘 要 】

WET-ETCH FIGURING (WEF) is an automated method of precisely figuring optical materials by the controlled application of aqueous etchant solution. This technology uses surface-tension-gradient-driven flow to confine and stabilize a wetted zone of an etchant solution or other aqueous processing fluid on the surface of an object. This wetted zone can be translated on the surface in a computer-controlled fashion for precise spatial control of the surface reactions occurring (e.g. chemical etching). WEF is particularly suitable for figuring very thin optical materials because it applies no thermal or mechanical stress to the material. Also, because the process is stress-free the workpiece can be monitored during figuring using interferometric metrology, and the measurements obtained can be used to control the figuring process in real-time--something that cannot be done with traditional figuring methods.