Automated suppression of errors in LTP-II slope measurements with x-ray optics. Part1: Review of LTP errors and methods for the error reduction

Ali, Zulfiqar ; Yashchuk, Valeriy V.

关键词: surface slope metrology;    drift error;    systematic error;    optimal scanning;    metrology of x-ray optics;    deflectometry;   

DOI  :  10.2172/1170544
RP-ID  :  LBNL-5586E
PID  :  OSTI ID: 1170544

学科分类：工程和技术（综合）

美国|英语

来源: SciTech Connect