科技报告详细信息
| Automated suppression of errors in LTP-II slope measurements with x-ray optics. Part1: Review of LTP errors and methods for the error reduction | |
| Ali, Zulfiqar ; Yashchuk, Valeriy V. | |
| 关键词: surface slope metrology; drift error; systematic error; optimal scanning; metrology of x-ray optics; deflectometry; | |
| DOI : 10.2172/1170544 RP-ID : LBNL-5586E PID : OSTI ID: 1170544 |
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| 学科分类：工程和技术（综合） | |
| 美国|英语 | |
| 来源: SciTech Connect | |
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| Files | Size | Format | View |
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| RO201704210002309LZ | 446KB |  download |
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