Automated suppression of errors in LTP-II slope measurements of x-ray optics. Part 2: Specification for automated rotating/flipping/aligning system

Ali, Zulfiqar ; Yashchuk, Valeriy V.

关键词: surface slope metrology;    drift error;    systematic error;    optimal scanning;    metrology of x-ray optics;    deflectometry;   

DOI  :  10.2172/1170543
RP-ID  :  LBNL-5587E
PID  :  OSTI ID: 1170543

学科分类：社会科学、人文和艺术（综合）

美国|英语

来源: SciTech Connect

【 摘 要 】

Systematic error and instrumental drift are the major limiting factors of sub-microradian slope metrology with state-of-the-art x-ray optics. Significant suppression of the errors can be achieved by using an optimal measurement strategy suggested in [Rev. Sci. Instrum. 80, 115101 (2009)]. With this series of LSBL Notes, we report on development of an automated, kinematic, rotational system that provides fully controlled flipping, tilting, and shifting of a surface under test. The system is integrated into the Advanced Light Source long trace profiler, LTP-II, allowing for complete realization of the advantages of the optimal measurement strategy method. We provide details of the system?s design, operational control and data acquisition. The high performance of the system is demonstrated via the results of high precision measurements with a spherical test mirror.