The Energetic Neutral Atom Beam Lithography & Epitaxy (ENABLE) Capability at LANL

Hoffbauer, Mark A¹ 

[1] Los Alamos National Laboratory

关键词: ATOMS;    DETECTION;    ENERGY SECURITY;    EPITAXY;    ETCHING;    FABRICATION;    HARVESTING;    LANL;    MAMMARY GLANDS;    NEOPLASMS;    NEUTRON DETECTION;    NITRIDES;    PHOTONS;    PRODUCTION;    RESOLUTION;    SEMICONDUCTOR MATERIALS;    SOLID STATE LASERS;    THIN FILMS;   

DOI  :  10.2172/1043513
RP-ID  :  LA-UR-12-22109
PID  :  OSTI ID: 1043513
Others  :  TRN: US201214%%139

学科分类：材料科学（综合）

美国|英语

来源: SciTech Connect

【 摘 要 】

No abstract prepared.