Thermal processing of aqueous AZO inks towards functional TCO thin films

JOURNAL OF ALLOYS AND COMPOUNDS

卷:690

Article

Vernieuwe, Kenny¹  Cuypers, Dieter^2,3  Kirschhock, Christine E. A.⁴  Houthoofd, Kristof⁴  Vrielinck, Henk⁵  Lauwaert, Johan⁶  De Roo, Jonathan¹  Martins, Jose C.^7,8  Van Driessche, Isabel¹  De Buysser, Klaartje¹ 

[1] Univ Ghent, Dept Inorgan & Phys Chem, SCRiPTS, Krijgslaan 281-S3, B-9000 Ghent, Belgium

[2] IMEC, Ctr Microsyst Technol CMST, Technol Pk 914, B-9052 Ghent, Belgium

[3] Univ Ghent, Technol Pk 914, B-9052 Ghent, Belgium

[4] Katholieke Univ Leuven, Ctr Surface Chem & Catalysis, Leuven, Belgium

[5] Univ Ghent, Dept Solid State Sci, DiSC, Krijgslaan 281-S1, B-9000 Ghent, Belgium

[6] Univ Ghent, Dept Elect & Informat Syst ELIS, St Pietersnieuwstr 41, B-9000 Ghent, Belgium

[7] Univ Ghent, NMR, Krijgslaan 281-S4, B-9000 Ghent, Belgium

[8] Univ Ghent, Dept Organ & Macromol Chem, Struct Anal Unit, Krijgslaan 281-S4, B-9000 Ghent, Belgium

关键词: Al-doped ZnO;    Thin film;    Inkjet printing;    Transparent conductors;    Sol-gel;   

DOI  :  10.1016/j.jallcom.2016.08.120

来源: Elsevier

【 摘 要 】

Aluminium doped zinc oxide is considered an interesting, earth abundant alternative to the transparent conductor indium tin oxide. In this respect, we synthesized Al-ZnO (AZO) thin films by a chemical solution deposition approach. Using water-based inks, the AZO thin films were printed in one single step on glass substrates in non-vacuum conditions. The drying process and the humidity of the atmosphere proved to be crucial during the thermal processing of the wet deposited thin films. To improve the understanding of the phenomena involved, the influence of these processing parameters on the final properties of the AZO thin films are investigated by FTIR, XRD, SEM, H-1 and Al-27 NMR and resistivity measurements. Optimal conditions were obtained by drying the wet thin film at 120 degrees C, followed by heating in a tube furnace until 500 degrees C under a 200 ppm O-2/N-2 atmosphere with a humidity controlled by bubbling the gas flow through 2 glass bottles containing water at 20 degrees C. AZO thin films with an resistivity of 2.54 x 10(-2) Omega cm were obtained. (C) 2016 Elsevier B.V. All rights reserved.

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