High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments

JOURNAL OF HAZARDOUS MATERIALS

卷:394

Article

Hoang-Phuong Phan¹  Toan Dinh^1,3  Tuan-Khoa Nguyen¹  Qamar, Afzaal⁴  Thanh Nguyen¹  Van Thanh Dau^1,2  Han, Jisheng¹  Dzung Viet Dao^1,2  Nam-Trung Nguyen¹ 

[1] Griffith Univ, Queensland Micro & Nanotechnol Ctr, Nathan, Qld, Australia

[2] Griffith Univ, Sch Engn & Built Environm, Nathan, Qld, Australia

[3] Univ Southern Queensland, Sch Engn, Nathan, Qld, Australia

[4] Univ Michigan, Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA

关键词: Silicon carbide;    Flexible electronics;    Environment monitoring;    Hazardous environments;   

DOI  :  10.1016/j.jhazmat.2020.122486

来源: Elsevier

【 摘 要 】

With its unprecedented properties over conventional rigid platforms, flexible electronics have been a significant research topic in the last decade, offering a broad range of applications from bendable display, flexible solar-energy systems, to soft implantable-devices for health monitoring. Flexible electronics for harsh and hazardous environments have also been extensively investigated. In particular, devices with stretchability and bend-ability as well as tolerance to extreme and toxic operating conditions are imperative. This work presents silicon carbide grown on silicon and then transferred onto polyimide substrate as a new platform for flexible sensors for hostile environments. Combining the excellent electrical properties of SiC and high temperature tolerance of polyimide, we demonstrated for the first time a flexible SiC sensors that can work above 400 degrees C. This new sensing platform opens exciting opportunities toward flexible sensing applications in hazardous environments.

【 授权许可】

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