Fast-fabrication process for low environmental impact microsystems

JOURNAL OF CLEANER PRODUCTION

卷:108

Article

Lemaire, Etienne^1,2  Thuau, Damien¹  Caillard, Benjamin¹  Dufour, Isabelle¹ 

[1] Univ Bordeaux, IMS, UMR 5218, F-33400 Talence, France

[2] EPFL, IMT LMTS, Neuchatel, Switzerland

关键词: Microelectromechanical system;    Fabrication;    Prototyping;    Low cost;    Environmental impact;    Cleantech;   

DOI  :  10.1016/j.jclepro.2015.05.111

来源: Elsevier

【 摘 要 】

In the context of building a sustainable future by reducing fossil energy consumption with the objective of minimizing detrimental climate change, particular attention was given to minimizing the complexity, energy consumption and environmental impact of microstructures manufacturing. In this work a new fast-fabrication process for microelectromechanical systems is presented. The name of this new fabrication process is KISSES for Keep It Short, Simple and Environmentally Sustainable. Combining classical deposition techniques (with common metals and polymers and with less common materials such as tree resins, paper and glue), release techniques and a computer numerical control cutting machine, a two-dimensional fabrication process has been developed and the first steps of three-dimensional microfabrication have also been initiated. In order to test this new process, various test structures have been fabricated and tested. These include resonant structures with electronic actuation and electronic measurement, having good quality factors for plastic-based devices, and high-resolution masks (similar to 10 mu m) which can be used, for example, for screen-printing techniques. Finally, a temperature sensor and a viscosity sensor have been designed, fabricated with the KISSES process and characterized. These devices exhibit, respectively, a limit of detection of 0.112 degrees C and a viscosity estimation error of less than 10% for viscous silicone oils from 5 cP to 50 cP. These characterizations of the microdevices show that the proposed process provides a simple method that is capable of fabricating devices that function with high performance. The aim of developing a rapid, simple and environmentally sustainable process has therefore been demonstrated. (C) 2015 Elsevier Ltd. All rights reserved.

【 授权许可】

Free