Growth of oblique sputtered Co and CoCrPt thin films for high-density tape recording

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS

卷:290

Article; Proceedings Paper

Nguyen, LT ; Tichelaar, FD ; Lodder, JC

关键词: magnetic anisotropy;    magnetic recording media;    thin films;    sputtering;   

DOI  :  10.1016/j.jmmm.2004.11.462

来源: Elsevier

【 摘 要 】

In this paper, we report the properties of Co/Cr and CoCrPt/CoCrMn thin films grown by oblique sputtering onto polymer substrates. It is observed that in both cases, the underlayers promote the formation of HCP-structure of the magnetic layers, which results in a high magnetic anisotropy of the films consequently, high coercivities of 200 and 300 kA/m are obtained in the 20 nm Co/180 nm Cr and 30 nm CoCrPt/50 nm CoCrMn films, respectively. However, in the case of Co/Cr film, Co grains are relatively large and elongated following the transverse direction while in the case of CoCrPt/CoCrMn film, a tiny columnar structure inclined toward the incident direction is observed. This fact results in a different magnetic behavior of these films. (c) 2004 Elsevier B.V. All rights reserved.

【 授权许可】

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