Properties of obliquely sputtered Co on different underlayers on polymer substrate

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS

卷:272

Article; Proceedings Paper

Nguyen, LT ; Lodder, JC

关键词: thin film;    oblique deposition;    polymer substrate;    underlayer;    magnetic anisotropy;   

DOI  :  10.1016/j.jmmm.2003.12.524

来源: Elsevier

【 摘 要 】

Co films have been obliquely sputtered on different underlayers (Cr and Cu) onto polymer substrate. The thickness of Co and the underlayer were kept at 20 nm and 180 nm, respectively. Microstructural and magnetic properties of these films have been analysed. In all films, the in plane anisotropy is confined in the direction perpendicular to the incident plane (transverse direction). However, the different microstructure of underlayers strongly affected properties of the magnetic layer. The H-c in the transverse direction are 180 and 80 kA/m for Cr and Cu, respectively. (C) 2003 Elsevier B.V. All rights reserved.

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