The influence of tantalum content in relation to substrate temperature on magnetic and structural properties of Co-Cr-Ta thin films

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS

卷:193

Article; Proceedings Paper

Le Kim, P ; Lodder, C ; Luong, NH ; Hien, TD

关键词: thin films;    substrate temperature;    tantalum;    RF-sputtering;   

DOI  :  10.1016/S0304-8853(98)00412-0

来源: Elsevier

【 摘 要 】

In this study, we investigated the influence of Ta content (in Co86Cr12Ta2 and Co82Cr13Ta5 compositions) on magnetic and structural properties of Co-Cr-Ta perpendicular media samples grown on Si substrates at different substrate temperatures during RF-sputter deposition. In general, coercivity of Co82Cr13Ta5 samples is higher than that of Co86Cr12Ta2 samples, whereas the perpendicular c-axis orientation of Co86Cr12Ta2 samples is better. Ta content was suggested to be in between 2 and 5 at% to give optimum magnetic and structural properties. (C) 1999 Elsevier Science B.V. All rights reserved.

【 授权许可】

Free