Measurement of the sputter yield after mild ion erosion of a pristine Cu(001) surface

SURFACE SCIENCE

卷:606

Article

Stoian, Georgiana¹  van Gastel, Raoul¹  Wormeester, Herbert¹  Poelsema, Bene¹ 

[1] Univ Twente, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands

关键词: Sputter yield;    Ion beam induced defects;    STM;   

DOI  :  10.1016/j.susc.2012.06.013

来源: Elsevier

【 摘 要 】

Using the STM technique we have determined the sputter yield on a pristine Cu(001) surface after mild (fluence less than 0.044 ions per surface atom) bombardment of the pristine surface with 800 eV Ar+ ions at normal incidence. The experiments have been performed at substrate temperatures ranging from 200 to 350 K. Making use of the positional correlation of adatoms and surface vacancies, at 200 K and 325 K, we concluded that about 1/3 of the surface adatoms originate from interstitials arriving at the surface and they give a direct indication of the buried bulk vacancies. A careful analysis of the different areas for surface vacancies and adatom then allowed a quantitative evaluation of the sputter yield at 1.2 Cu atoms per 800 eV Ar+ ion. (C) 2012 Elsevier B.V. All rights reserved.

【 授权许可】

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