Deep level promotion mechanism in sputtering

SURFACE SCIENCE

卷:423

Article

Sindona, A ; Falcone, G

关键词: ion emission;    ion-solid interactions;    metallic surfaces;    models of non-equilibrium phenomena;    scattering and sputtering;   

DOI  :  10.1016/S0039-6028(98)00917-0

来源: Elsevier

【 摘 要 】

We have applied a double decoupled localized level Anderson-Newns Hamiltonian to the analysis of surface effects upon the ionized fraction R+ of sputtered atoms from a metal surface. Electronic excitations, induced in the conduction band by the transient formation of quasi-molecular systems, between substrate and emitted atoms, in the collision cascade generated by the primary incident beam, have been explicitly included into an instantaneous transition matrix peaked at the Fermi level of the material. The interaction dynamics seem to take place over two different time scales, one related to sputtered atom trajectories and the other to recoiled substrate particles. Finite temperature calculations have suggested, at very low ejection energies, a power law dependence of the final charge state of the sputtered beam on its detected velocity. This result is in agreement, in the zero temperature limit, with some previously published papers and its validity has been compared with other theoretical outcomes and tested on SIMS data. (C) 1999 Elsevier Science B.V. All rights reserved.

【 授权许可】

Free