Installation of TOF-E telescope ERDA in UTTAC at the University of Tsukuba: Analysis of metal-nitride-based multi-layer coatings on glasses

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:503

Article

Sugisawa, Y.¹  Harayama, I¹  Takimoto, Y.²  Wakasugi, T.³  Hirose, Y.³  Hasegawa, T.³  Ishii, S.⁴  Sekiba, D.^1,4 

[1] Univ Tsukuba, Inst Appl Phys, Tennodai 1-1-1, Tsukuba, Ibaraki 3058573, Japan

[2] AGC Inc, Innovat Technol Labs, Yokohama, Kanagawa 2218755, Japan

[3] Univ Tokyo, Sch Sci, Dept Chem, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1130033, Japan

[4] Univ Tsukuba, Tandem Accelerator Complex UTTAC, Tennodai 1-1-1, Tsukuba, Ibaraki 3058577, Japan

关键词: Ion beam analysis;    Elastic recoil detection analysis;    Time of flight;   

DOI  :  10.1016/j.nimb.2021.07.006

来源: Elsevier

【 摘 要 】

We present the development of time-of-flight/energy (TOF-E) telescope for elastic recoil detection analysis (ERDA) in UTTAC at the University of Tsukuba. The designs of the TOF tube are introduced. The performance for the quantification and mass resolution for light elements is confirmed on a CaTaOxNy film deposited on a Si substrate. The results are cross-checked by the data taken by an existing Delta E-E telescope ERDA system, which was previously installed in MALT at The University of Tokyo. The newly developed system can be used to reveal the relationship between the film deposition condition and the contamination quantitatively on a Si-Al-N (SiAlN) film on a SiO2 substrate. Finally, the analysis of a triple-layered metal nitrides film on a soda glass substrate, in which each layer has a thickness of 10 to15 nm, is shown. From the analysis of the surface peak of oxygen, the time resolution corresponds to depth resolution of 2.1 nm at the surface. The overall practical depth resolution conservatively estimated as better than 10 nm, because the depth profiles of various elements show clear counters corresponding to the three layers.

【 授权许可】

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