Fabrication of copper and gold nanoclusters in MgO (100) by MeV ion implantation

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:141

Article; Proceedings Paper

Zimmerman, RL ; Ila, D ; Williams, EK ; Sarkisov, S ; Poker, DB ; Hensley, DK

关键词: nanoclusters;    ion implantation;    metal nanoclusters;   

DOI  :  10.1016/S0168-583X(98)00019-6

来源: Elsevier

【 摘 要 】

MeV ions of Au and Cu were implanted into single crystals of MgO (100) and the formation of metallic nanoclusters was observed by an indirect method of optical absorption spectrophotometry, Using Mie's theory we related the observed optical absorption band to the formation of nanoclusters and using Doyle's theory, as well as Rutherford Backscattering Spectrometry (RBS), we correlated the full width half maximum (FWHM) of the absorption bands to the estimated size of the metallic nanoclusters between 1 and 10 nm. These clusters were formed by implantation above the threshold fluence for cluster formation and by a combination of threshold fluence of the implanted species and thermal annealing. The changes in the estimated size of the nanoclusters, after annealing at temperatures ranging from 500 degrees C to 1000 degrees C, were observed using optical absorption spectrophotometry and calculated using Doyle's theory. (C) 1998 Elsevier Science B.V. All rights reserved.

【 授权许可】

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