Mass spectrometry improvement on an high current ion implanter

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:269

Article; Proceedings Paper

Lopes, J. G.^1,2  Alegria, F. C.^3,4  Redondo, L. M.^1,2  Rocha, J.⁵  Alves, E.⁵ 

[1] Univ Lisbon, Inst Super Engn Lisboa, P-1959007 Lisbon, Portugal

[2] Univ Lisbon, Ctr Fis Nucl, P-1959007 Lisbon, Portugal

[3] Univ Lisbon, Inst Super Tecn Tech, P-1049001 Lisbon, Portugal

[4] Inst Telecomunicacoes, P-1049001 Lisbon, Portugal

[5] Inst Tecnol Nucl, P-2685953 Sacavem, Portugal

关键词: High current ion implanter;    LabVIEW;    Mass spectrum;    Hyperfine interactions;   

DOI  :  10.1016/j.nimb.2011.04.086

来源: Elsevier

【 摘 要 】

The development of accurate mass spectrometry, enabling the identification of all the ions extracted from the ion source in a high current implanter is described. The spectrometry system uses two signals (x-y graphic), one proportional to the magnetic field (x-axes), taken from the high-voltage potential with an optic fiber system, and the other proportional to the beam current intensity (y-axes), taken from a beam-stop. The ion beam mass register in a mass spectrum of all the elements magnetically analyzed with the same radius and defined by a pair of analyzing slits as a function of their beam intensity is presented. The developed system uses a PC to control the displaying of the extracted beam mass spectrum, and also recording of all data acquired for posterior analysis. The operator uses a LabVIEW code that enables the interfacing between an I/O board and the ion implanter. The experimental results from an ion implantation experiment are shown. (C) 2011 Elsevier B.V. All rights reserved.

【 授权许可】

Free