Specular and diffuse scattering of X-rays from a fusion-drawn glass surface

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:133

Article; Proceedings Paper

Umbach, CC ; Blakely, JM

关键词: fusion-drawn glass;    glass surfaces;    surface roughness;    X-ray reflectometry;    plasma cleaning;    GIXS;   

DOI  :  10.1016/S0168-583X(97)00548-X

来源: Elsevier

【 摘 要 】

The specular reflectivity and diffuse intensity of 11.28 keV X-rays scattered from the surface of Coming Code 1737 glass cleaned in an oxygen plasma have been measured, The specular reflectivity is consistent with the glass being constituted of two layers on top of the bulk: a top layer 2 Angstrom thick with an average electron density 70% of the bulk and an intermediate layer 18 Angstrom thick with an electron density 91% of the bulk. A fit of both reflectivity and diffuse intensity to a model of surface roughness that includes gradients in electron density indicates a surface roughness of 4.7 Angstrom. This measurement is consistent with rms surface roughness measurements made with atomic force microscopy. (C) 1997 Published by Elsevier Science B.V.

【 授权许可】

Free