Laterally organized carbon nanotube arrays based on hot-filament chemical vapor deposition

THIN SOLID FILMS

卷:519

Article; Proceedings Paper

Kim, Ki-Hwan¹  Lefeuvre, Emmanuel¹  Chatelet, Marc¹  Pribat, Didier^1,2  Cojocaru, Costel-Sorin¹ 

[1] Ecole Polytech, UMR 7647, Phys Interfaces & Couches Minces Lab, F-91128 Palaiseau, France

[2] Sungkyunkwan Univ, Dept Energy Sci, Suwon 440746, South Korea

关键词: Porous anodic alumina;    Carbon nanotubes;    Hot-filament chemical vapor deposition;   

DOI  :  10.1016/j.tsf.2011.01.334

来源: Elsevier

【 摘 要 】

Lateral porous anodic alumina (PAA) templates were used to organize carbon nanotubes (CNTs) grown by a hot-filament assisted chemical vapor deposition (HFCVD) process. For the CNT growth, we used a modified home-made HFCVD system with two independently powered filaments which are fitted respectively on the methane (CH4) gas line, which serves as a carbon precursor and on the hydrogen (H-2) gas line, which acts as an etching agent for the parasitic amorphous carbon. Various activation powers of the hot filaments were used to directly or indirectly decompose the gas mixtures at relatively low substrate temperatures. A parametric study of the HFCVD process has been carried out for optimizing the confined CNTs growth inside the lateral PAA templates. (C) 2011 Elsevier B.V. All rights reserved.

【 授权许可】

Free