Mechanical properties of homogeneous and nitrogen graded TiN thin films

THIN SOLID FILMS

卷:710

Article

Silva, Felipe C.^1,2  Tunes, Matheus A.³  Sagas, Julio C.⁴  Fontana, Luis C.⁴  de Lima, Nelson B.⁵  Schon, Claudio G.¹ 

[1] Univ Sao Paulo, Dept Met & Mat Engn, Escola Politecn, Av Prof Mello Moraes 2463, BR-05508900 Sao Paulo, SP, Brazil

[2] Ctr Estadual Educ Tecnol Paula Souza, Fac Tecnol Cotia, Rua Nelson Raineri 700, BR-06702155 Cotia, SP, Brazil

[3] Montan Univ Leoben, Chair Nonferrous Met, Franz Josef Str 18, A-8700 Leoben, Austria

[4] Univ Estado Santa Catarina, Lab Plasmas Films & Surfaces, Rua Paulo Malschitzki,200 Zona Ind Norte, BR-89219710 Joinville, SC, Brazil

[5] Inst Pesquisas Energet & Nucl, Ctr Ciencias & Tecnol Mat, Comissao Nacl Energia Nucl Selo Paulo, Av Prof Lineu Prestes 2242 Butanta, BR-05508000 Sao Paulo, SP, Brazil

关键词: Characterization;    Fracture behavior;    Stress measurements;    X-ray analysis;    Ceramics;    Coatings;   

DOI  :  10.1016/j.tsf.2020.138268

来源: Elsevier

【 摘 要 】

Coating of metallic industrial parts with titanium nitride (TiN) is widely used with the aim to improve the mechanical and tribological properties of these parts. In the present work, TiN films were deposited via grid-assisted magnetron sputtering on aluminium substrates. The films were grown under different substrate bias voltage (-40, -75 or -100 V) and two different modes of nitrogen supply during deposition (constant and variable), resulting in homogeneous and N-graded films. The results of tension fractures observed in situ were correlated with the film microstructure and residual stress levels obtained through grazing incidence X-ray diffraction measurements. Elastic properties of the films were analysed via nanoindentation and adhesive properties were investigated by nanoscratching tests. Results show that the delamination load of the graded films is higher than in the homogeneous counterparts, suggesting the graded film have improved tribological properties.

【 授权许可】

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