Properties of (K,Na)NbO3-based lead-free piezoelectric films prepared by pulsed laser deposition

THIN SOLID FILMS

卷:518

Article

Chua, Ngeah Theng¹  You, Lu¹  Ma, Jan¹  Wang, Junling¹ 

[1] Nanyang Technol Univ, Sch Mat Sci & Engn, Singapore 639798, Singapore

关键词: Lead-free piezoelectric;    (K,Na)NbO3;    Morphotropic phase boundary;    X-ray diffraction;    Dielectric properties;   

DOI  :  10.1016/j.tsf.2010.06.016

来源: Elsevier

【 摘 要 】

To investigate the properties of (K,Na)NbO3-based lead-free piezoelectric films at the morphotropic phase boundary composition, we fabricated epitaxial [(K05Na05)(0) Li-97(0) (03)] (Nb08Ta02)O-3 films on (001), (110) and (111)-oriented single crystal SrTiO3 substrates by pulsed laser deposition. The structure and electrical properties of the films were studied. Dielectric constants of 540, 390 and 300 and remnant polarizations of 4.00, 1.05, and 0.35 mu C/cm(2) were observed for the (001), (110) and (111) oriented films, respectively (C) 2010 Elsevier B.V. All rights reserved.

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