Future prospect of remote Cat-CVD on the basis of the production, transportation and detection of H atoms

THIN SOLID FILMS

卷:516

Article; Proceedings Paper

Umemoto, Hironobu¹  Matsumura, Hideki² 

[1] Shizuoka Univ, Fac Engn, Naka Ku, Hamamatsu, Shizuoka 4328561, Japan

[2] Japan Adv Inst Sci & Technol, Sch Mat Sci, Nomi, Ishikawa 9231292, Japan

关键词: catalytic chemical vapor deposition;    Cat-CVD;    hot-wire CVD;    remote CVD;    gas-phase diagnoses;   

DOI  :  10.1016/j.tsf.2007.06.042

来源: Elsevier

【 摘 要 】

The future prospect of remote Cat-CVD, in which the decomposition and the deposition chambers are separated, is discussed on the basis of the absolute density measurements of H atoms. It is now well recognized that uniform deposition is possible on a large area without plasma damages by Cat-CVD. However, we may not overlook the demerits in Cat-CVD. One of the demerits is the poisoning of the catalyzer surfaces by the material gases, both temporary and permanent. One technique to overcome this problem is remote Cat-CVD. The question is how to separate the decomposition and deposition areas. If the separation is not enough, there should be back diffusion of the material gases, which will poison the catalyzers. If the separation is too tight, radicals may not effuse out from the decomposition chamber. These problems are discussed and it is shown that SiO2 coating to reduce the radical recombination rates on walls is promising. The possibility of the polytetrafluoroethene coating by Cat-CVD is also discussed. (C) 2007 Elsevier B.V. All rights reserved.

【 授权许可】

Free