Relationship between structure, surface topography and tribo-mechanical behavior of Ti-N thin films elaborated at different N2 flow rates

THIN SOLID FILMS

卷:724

Article

Aissani, Linda^1,2  Alhussein, Akram³  Ayad, Abdelhak⁴  Nouveau, Corinne⁵  Zgheib, Elia³  Belgroune, Ahlam^1,3  Zaabat, Mourad¹  Barille, Regis⁶ 

[1] Larbi Ben MHidi Univ, Lab Act Components & Mat, Oum El Bouaghi 04000, Algeria

[2] Abbes Laghrour Khenchela Univ, Phys Dept, PO 1252, El Hamma 40004, Khenchela, Algeria

[3] Univ Technol Troyes, Pole Technol Sud Champagne, LASMIS, 26 Rue Lavoisier, F-52800 Nogent, France

[4] Univ Salah Boubnider Constantine 3 Nouvelle Ville, Fac Med, Dept Pharm, Constantine, Algeria

[5] HESAM Univ, Arts & Metiers Inst Technol, LABOMAP, F-71250 Cluny, France

[6] Univ Angers, Moltech Anjou, CNRS UMR 62002, Bd Lavoisier, F-49045 Angers, France

关键词: Titanium nitride;    Magnetron sputtering;    Microstructure;    Hydrophobicity;    Hardness;    Adhesion;   

DOI  :  10.1016/j.tsf.2021.138598

来源: Elsevier

【 摘 要 】

Titanium nitride films were deposited by reactive magnetron sputtering on Si (100) wafers, glass and Ti6Al4V substrates. The film deposition was carried out in a gas mixture of Ar and N2. The nitrogen content was varied between 0 and 30 % of the total gas mixture. This variation led to the formation of different films with different microstructures. The microstructure of the Ti-N coatings presented nanocomposites with a low tendency to surface oxidation. From a pure Ti to tetragonal Ti2N and cubic Ti-N microstructures, the films showed a (111) TiN plane growth that led to an increase in the lattice strain and a decrease in the grain size when increasing the nitrogen flow rate. The water-film contact angle measurements showed that the surface hydrophobicity increased with the increase of nitrogen content in the film. Mechanical properties were measured and a strong dependence between microstructure and hardness was found. The Ti-N deposited under 20 % of N2 exhibited the highest hardness, the best adhesion and wear resistance, and the lowest friction coefficient with the presence of (111) fiber texture.

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