Tin oxide nanosheet thin film with bridge type structure for gas sensing

THIN SOLID FILMS

卷:698

Article

Choi, Pil Gyu¹  Shirahata, Naoto^2,3,4  Masuda, Yoshitake¹ 

[1] Natl Inst Adv Ind Sci & Technol, Moriyama Ku, 2266-98 Anagahora, Nagoya, Aichi 4638560, Japan

[2] Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton WPI MANA, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan

[3] Chuo Univ, Dept Phys, Bunkyo Ku, 1-13-27 Kasuga, Tokyo 1128551, Japan

[4] Hokkaido Univ, Grad Sch Chem Sci & Engn, Sapporo, Hokkaido 0600814, Japan

关键词: Tin oxide;    Nanosheet;    Thin film;    Bridge type structure;    Gas sensor;   

DOI  :  10.1016/j.tsf.2020.137845

来源: Elsevier

【 摘 要 】

A bridge type structure of the SnO2 nanosheet thin film was formed on the Pt interdigitated-electrodes printed SiO2 substrate via a simple synthesis process. The SnO2 nanosheet has ca. 150 nm of flat plane and extremely thin thickness. In addition, the thin film between Pt interdigitated-electrodes was floated from the substrate. It was found that the sensor signal response considerably increased by using the SnO2 nanosheet thin film with bridge type structure as compared to the SnO2 nanosheet with normal structure, especially for extremely low concentration of nonanal gas which is biomarker of lung cancer. The higher sensing response was attributed to introduction of space under thin film which acts as reaction rooms and provide the plenty of time to stay for the reaction.

【 授权许可】

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