Ferroelectric Bi3.25La0.75Ti3O12 thin films on a conductive Sr4Ru2O9 electrode obtained by pulsed laser deposition

THIN SOLID FILMS

卷:515

Article; Proceedings Paper

Chmielowski, R. ; Madigou, V. ; Ferrandis, Ph. ; Zalecki, R. ; Blicharski, M. ; Leroux, Ch.

关键词: pulsed laser deposition;    FeRAM;    ferroelectric thin films;    Bi3.25La0.75Ti3O12;    Sr4Ru2O9;    electron microscopy;   

DOI  :  10.1016/j.tsf.2006.11.075

来源: Elsevier

【 摘 要 】

Strontium ruthenate and Bi3.25La0.75Ti3O12 (BLT) layers were grown on Si(100) substrate using pulsed laser deposition technique. Starting from a Sr2RuO4 target, we obtained single phase films composed of Sr4Ru2O9; on these strontium ruthenate electrodes, textured and non-textured BLT were grown at 700 degrees C. Structural characterizations of these double layers were done by X-ray diffraction, scanning electron microscopy, normal and high-resolution transmission electron microscopy. The Van der Pauw's resistivity measurements indicate that Sr4Ru2O9 can be used as a back electrode. The temperature dependence of the resistivity at low temperatures is rho(T) =rho(0)exp poexp(T-0/T)(1/2), which corresponds to a variable-range hopping mechanism. (C) 2006 Elsevier B.V. All rights reserved.

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