THIN SOLID FILMS | 卷:518 |
Carbide and nanocomposite thin films in the Ti-Pt-C system | |
Article | |
Lewin, Erik1  Buchholt, Kristina2  Lu, Jun3  Hultman, Lars3  Spetz, Anita Lloyd2  Jansson, Ulf1  | |
[1] Uppsala Univ, Angstrom Lab, Dept Chem Mat, SE-75121 Uppsala, Sweden | |
[2] Linkoping Univ, Dept Phys Chem & Biol, Div Appl Phys, IFM, SE-58131 Linkoping, Sweden | |
[3] Linkoping Univ, Dept Phys Chem & Biol, Thin Film Phys Div, IFM, SE-58131 Linkoping, Sweden | |
关键词: Solid solution carbide; Nanocomposite; Sputtering; Gas sensor; Annealing; Transmission electron microscopy; X-ray photoelectron spectroscopy; X-ray diffraction; | |
DOI : 10.1016/j.tsf.2010.03.017 | |
来源: Elsevier | |
【 摘 要 】
Thin films in the Ti-Pt-C system were deposited by non-reactive, DC-magnetron sputtering. Samples were characterised using X-ray photoelectron spectroscopy, X-ray diffraction, and transmission electron microscopy. A previously not reported metastable solid solution carbide, (Ti1-xPtx)C-y with a Pt/Ti ratio of up to 0.43 was observed. This solid solution phase was present both as single phase in polycrystalline samples, and together with amorphous carbon (a-C) in nanocomposite samples. Annealing of nanocomposite samples leads to the decomposition of the solid solution phase and the formation of a nc-TiCx/a-C/nc-Pt nanocomposite. Test sensors for automotive gas exhausts manufactured from such a three-phase material suffer from complete oxidation of the coating at 400 degrees C with no observed sensor activity. (c) 2010 Elsevier B.V. All rights reserved.
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