Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics

THIN SOLID FILMS

卷:518

Article

Tsarfati, T.¹  van de Kruijs, R. W. E.¹  Zoethout, E.¹  Louis, E.¹  Bijkerk, F.^1,2 

[1] FOM Inst Plasma Phys Rijnhuizen, Nieuwegein, Netherlands

[2] Univ Twente, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands

关键词: Multilayer;    Lithography;    X-FEL;    GIXR;    TEM;    XPS;   

DOI  :  10.1016/j.tsf.2010.04.088

来源: Elsevier

【 摘 要 】

Chemical diffusion and interlayer formation in thin layers and at interfaces is of increasing influence in nanoscopic devices such as nano-electronics, magneto-optical storage and multilayer X-ray optics. We show that with the nitridation of reactive B4C/La interfaces, both the chemical and optical contrast can be greatly enhanced. Although interaction and diffusion of N-2 from the substrate towards the adlayer does occur, this surfactant mediated growth contributes to chemical and optical interface properties that enable major reflectivity improvements of multilayer optics for 6.7<7.0 nm. (C) 2010 Elsevier B.V. All rights reserved.

【 授权许可】

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