The structural properties of CdS deposited by chemical bath deposition and pulsed direct current magnetron sputtering

THIN SOLID FILMS

卷:582

Article; Proceedings Paper

Lisco, F.¹  Kaminski, P. M.¹  Abbas, A.¹  Bass, K.¹  Bowers, J. W.¹  Claudio, G.¹  Losurdo, M.²  Walls, J. M.¹ 

[1] Univ Loughborough, CREST, Sch Elect Elect & Syst Engn, Loughborough LE11 3TU, Leics, England

[2] CNR, IMIP, Inst Inorgan Methodol & Plasmas, I-70126 Bari, Italy

关键词: Pulsed direct-current magnetron sputtering;    Chemical bath deposition;    Cadmium sulphide;    Thin films;    Film uniformity;    Pinhole free films;    Void-free films;   

DOI  :  10.1016/j.tsf.2014.11.062

来源: Elsevier

【 摘 要 】

Cadmium sulphide (CdS) thin films were deposited by two different processes, chemical bath deposition (CBD), and pulsed DC magnetron sputtering (PDCMS) on fluorine doped-tin oxide coated glass to assess the potential advantages of the pulsed DC magnetron sputtering process. The structural, optical and morphological properties of films obtained by CBD and PDCMS were investigated using X-ray photoelectron spectroscopy, X-ray diffraction, scanning and transmission electron microscopy, spectroscopic ellipsometry and UV-Vis spectrophotometry. The as-grown films were studied and comparisons were drawn between their morphology, uniformity, crystallinity, and the deposition rate of the process. The highest crystallinity is observed for sputtered CdS thin films. The absorption in the visible wavelength increased for PDCMS CdS thin films, due to the higher density of the films. The band gap measured for the as-grownCBD-CdS is 2.38 eV compared to 2.34 eV for PDCMS-CdS, confirming the higher density of the sputtered thin film. The higher deposition rate for PDCMS is a significant advantage of this technique which has potential use for high rate and low cost manufacturing. (C) 2014 The Authors. Published by Elsevier B.V.

【 授权许可】

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