Face-centered cubic (Al1-xCrx)2O3

THIN SOLID FILMS

卷:519

Article

Khatibi, A.¹  Palisaitis, J.¹  Hoglund, C.¹  Eriksson, A.¹  Persson, P. O. A.¹  Jensen, J.¹  Birch, J.¹  Eklund, P.¹  Hultman, L.¹ 

[1] Linkoping Univ, Thin Film Phys Div, Dept Phys Chem & Biol IFM, S-58183 Linkoping, Sweden

关键词: Alumina;    Chromia;    Sputtering;    Physical vapor deposition (PVD);    Solid solution;   

DOI  :  10.1016/j.tsf.2010.11.052

来源: Elsevier

【 摘 要 】

We report the discovery of a face-centered cubic (Al1-xCrx)(2)O-3 solid solution [0.60<0.70] in films grown onto Si substrates using reactive radio frequency magnetron sputtering from Al and Cr targets at 400 degrees C. The proposed structure is NaCl-like with 33% vacancies on the metal sites. The unit cell parameter is 4.04 angstrom as determined by X-ray diffraction. The films have a < 100 > preferred crystallographic orientation and exhibit hardness values up to 26 GPa and an elastic modulus of 220-235 GPa. (C) 2010 Elsevier B.V. All rights reserved.

【 授权许可】

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