期刊论文详细信息
THIN SOLID FILMS 卷:575
Photo-stability of a-Si solar cells fabricated by Liquid-Si printing method and treated with catalytic generated atomic hydrogen
Article
Murayama, Hiroko1  Ohyama, Tatsushi1  Yoshida, Isao1  Terakawa, Akira1  Masuda, Takashi2,3  Ohdaira, Keisuke2  Shimoda, Tatsuya2,3 
[1] Panasonic Corp, Device Solut Ctr, Moriguchi, Osaka 5708501, Japan
[2] Japan Adv Inst Sci & Technol, Nomi City, Ishikawa 9231292, Japan
[3] JST ERATO Shimoda Nanoliquid Proc Project, Nomi City, Ishikawa 9231292, Japan
关键词: Amorphous Si;    Solar cells;    Stability;    Liquid-Si;    Cyclopentasilane;    Atomic hydrogen treatment;    Cat-CVD;   
DOI  :  10.1016/j.tsf.2014.10.034
来源: Elsevier
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【 摘 要 】

The film properties and solar cell performances of hydrogenated amorphous silicon (a-Si:H) fabricated by a newly developed non-vacuum process Liquid-Si printing method were systematically investigated by comparing to the conventional plasma-chemical vapor deposition method. The as-printed a-Si:H films showed relatively high Urbach-tail characteristic energy (E-ch), high [Si-H-2]/[Si-H], and low photoconductivity (similar to 10(-7) S/cm). However, the [Si-H-2]/[Si-H] decreased, and the photoconductivity was improved to the device grade level (similar to 10(-5) S/cm) after appropriate catalytic-generated atomic hydrogen treatment. It was also found that the light-induced degradation of the photoconductivity and solar cell efficiency of the printed samples were less than half of the conventional a-Si: H case. (C) 2014 Elsevier B.V. All rights reserved.

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