Detection and characterization of single nanoparticles by interferometric phase modulated ellipsometry

THIN SOLID FILMS

卷:519

Article; Proceedings Paper

Barroso, F.¹  Bosch, S.¹  Tort, N.¹  Arteaga, O.¹  Sancho-Parramon, J.²  Jover, E.¹  Bertran, E.¹  Canillas, A.¹ 

[1] Univ Barcelona, IN2UB, Dep Fis Aplicada & Opt, Barcelona 08028, Spain

[2] Rudjer Boskovic Inst, Zagreb 10002, Croatia

关键词: Polarimetry;    Interferometry;    Phase-modulated ellipsometry;    Nanoparticles detection;   

DOI  :  10.1016/j.tsf.2010.12.051

来源: Elsevier

【 摘 要 】

We introduce a new measurement system called Nanopolar interferometer devoted to monitor and characterize single nanoparticles which is based on the interferometric phase modulated ellipsometry technique. The system collects the backscattered light by the particles in the solid angle subtended by a microscope objective and then analyses its frequency components. The results for the detection of 2 mu m and 50 nm particles are explained in terms of a cross polarization effect of the polarization vectors when the beam converts from divergent to parallel in the microscope objective. This explanation is supported with the results of the optical modelling using the exact Mie theory for the light scattered by the particles. (C) 2010 Elsevier B.V. All rights reserved.

【 授权许可】

Free