Pulsed laser deposition of crystalline garnet waveguides at a growth rate of 20μm per hour

SURFACE & COATINGS TECHNOLOGY

卷:343

Article; Proceedings Paper

Grant-Jacob, James A.¹  Beecher, Stephen J.¹  Prentice, Jake J.¹  Shepherd, David P.¹  Mackenzie, Jacob I.¹  Eason, Robert W.¹ 

[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England

关键词: Pulsed laser deposition;    Optical fabrication;    Integrated optics;    Laser materials;    Planar waveguides;    Thin films;   

DOI  :  10.1016/j.surfcoat.2017.12.008

来源: Elsevier

【 摘 要 】

We report pulsed laser deposition of high-quality crystalline yttrium aluminium oxide and yttrium gallium oxide with a growth rate approaching 20 mu m per hour by using an excimer laser operating at a repetition rate of 100 Hz. This result demonstrates the capability of PLD at 100 Hz for upscaling deposition speeds to a rate that is industrially relevant. In addition, we show that use of this high repetition rate can cause additional heating of the substrate, which in turn affects the film composition. This effect is used as an additional control parameter on the composition, and thus refractive index, of the grown material.

【 授权许可】

Free