Synthesis and characterization of hexamethyldisilane films deposited on stainless steel by plasma-enhanced chemical vapour deposition

SURFACE & COATINGS TECHNOLOGY

卷:404

Article

Figueroa, Neileth S.¹  Nachez, J. L.²  Freire, F. L., Jr.¹  da Costa, M. E. H. Maia¹ 

[1] Pontificia Univ Catolica Rio de Janeiro, Dept Fis, BR-22451900 Rio De Janeiro, Brazil

[2] INFES Univ Fed Fluminense Santo Antonio Padua, Santo Antonio De Padua, RJ, Brazil

关键词: Carbon films;    PECVD;    Hexamethyldisilane;    Raman;    Hardness;    Friction coefficient;   

DOI  :  10.1016/j.surfcoat.2020.126443

来源: Elsevier

【 摘 要 】

Films deposited on 316L stainless steel plates by plasma-enhanced chemical vapour deposition (PECVD) using hexamethyldisilane (HMDS) in the liquid phase as precursor were studied. We have determined their structural, mechanical, and tribological properties. The samples were deposited at 300 degrees C with a different self-bias voltage ranging from -150 V to -450 V. The films were characterized by X-Ray photoelectron spectroscopy and infrared absorption spectroscopy to determine the atomic concentrations and identify the chemical environment of the atoms in the films. Raman spectroscopy revealed the presence of carbons with sp(2) hybridization. The films have a polymeric character, as suggested by the strong luminescence background present in Raman spectra. Nanoindentation technique was used to measure the hardness of the film. Tribological properties were determined by reciprocal linear disc tests. Our results show that the carbon films prepared by PECVD using HMDS as precursors have high hardness and low friction coefficient.

【 授权许可】

Free