Fabrication of NOx gas sensors using In2O3-ZnO composite films

SENSORS AND ACTUATORS B-CHEMICAL

卷:146

Article

Lin, Chia-Yu¹  Fang, Yueh-Yuan²  Lin, Chii-Wann^2,3  Tunney, James J.⁴  Ho, Kuo-Chuan^1,5 

[1] Natl Taiwan Univ, Dept Chem Engn, Taipei 10617, Taiwan

[2] Natl Taiwan Univ, Inst Biomed Engn, Taipei 10617, Taiwan

[3] Natl Taiwan Univ, Inst Elect Engn, Taipei 10617, Taiwan

[4] Natl Res Council Canada, Inst Chem Proc & Environm Technol, Ottawa, ON K1A 0R6, Canada

[5] Natl Taiwan Univ, Inst Polymer Sci & Engn, Taipei 10617, Taiwan

关键词: Gas sensor;    Indium oxide;    In2O3-ZnO;    Nitric oxide;    Zinc oxide;   

DOI  :  10.1016/j.snb.2010.02.040

来源: Elsevier

【 摘 要 】

In2O3-ZnO composite films were fabricated and their NOx sensing characteristics were investigated in this study. The content of ZnO in In2O3-ZnO film was controlled by adjusting the Zn2+/In3+ molar ratio (r) during the film preparation. With suitable amount of ZnO incorporated into the ln(2)O(3) films, the responses of the composite films to NOx at operation temperatures below 200 degrees C were greatly improved. However, as the ZnO content was further increased, the grain of the composite film started to merge into big ones, thus decreasing the surface area and resulting in lower sensor responses. The detection limit (S/N = 3) of In2O3-ZnO composite film (r = 0.67) reached 12 ppb at 150 degrees C. Both pure In2O3 (r = 0) and In2O3-ZnO composite films (r = 0.67) showed no response to CO gas. (C) 2010 Elsevier B.V. All rights reserved.

【 授权许可】

Free