SiC-based MIS gas sensor for high water vapor environments

SENSORS AND ACTUATORS B-CHEMICAL

卷:175

Article; Proceedings Paper

Casals, Olga¹  Becker, Thomas²  Godignon, Philippe³  Romano-Rodriguez, Albert¹ 

[1] Univ Barcelona, MIND Dept Elect IN2UB, E-08028 Barcelona, Spain

[2] EADS Innovat Works, D-21129 Hamburg, Germany

[3] IMB CNM CSIC, Inst Microelect Barcelona, E-08193 Bellaterra, Spain

关键词: Gas sensor;    Water vapor;    Metal-insulator-semiconductor;    SiC;    Hydrogen;    CO;    Ethane;    Ethene;    Fuel cell;   

DOI  :  10.1016/j.snb.2011.12.032

来源: Elsevier

【 摘 要 】

In this work we will prove that SiC-based MIS capacitors can work in environments with extremely high concentrations of water vapor and still be sensitive to hydrogen, CO and hydrocarbons, making these devices suitable for monitoring the exhaust gases of hydrogen or hydrocarbons based fuel cells. Under the harshest conditions (45% of water vapor by volume ratio to nitrogen), Pt/TaOx/SiO2/SiC MIS capacitors are able to detect the presence of 1 ppm of hydrogen, 2 ppm of CO, 100 ppm of ethane or 20 ppm of ethene, concentrations that are far below the legal permissible exposure limits. (C) 2012 Elsevier B.V. All rights reserved.

【 授权许可】

Free