Geometrical considerations for the design of liquid-phase biochemical sensors using a cantilever's fundamental in-plane mode

SENSORS AND ACTUATORS B-CHEMICAL

卷:164

Article

Beardslee, L. A.¹  Josse, F.²  Heinrich, S. M.³  Dufour, I.⁴  Brand, O.¹ 

[1] Georgia Inst Technol, Dept Elect & Comp Engn, Elect & Comp Engn Fac, Atlanta, GA 30332 USA

[2] Marquette Univ, Dept Elect & Comp Engn, Milwaukee, WI 53233 USA

[3] Marquette Univ, Dept Civil & Environm Engn, Milwaukee, WI 53233 USA

[4] Univ Bordeaux, IMS, Talence, France

关键词: Liquid-phase;    Cantilevers;    Bio-chemical sensors;   

DOI  :  10.1016/j.snb.2012.01.035

来源: Elsevier

【 摘 要 】

The influence of the beam geometry on the quality factor and resonance frequency of resonant silicon cantilever beams vibrating in their fundamental in-plane flexural mode in water has been investigated. Compared to cantilevers vibrating in their first out-of-plane flexural mode, utilizing the in-plane mode results in reduced damping and reduced mass loading by the surrounding fluid. Quality factors as high as 86 have been measured in water for cantilevers with a 20 mu m thick silicon layer. Based on the experimental data, design guidelines are established for beam dimensions that ensure maximal Q-factors and minimal mass loading by the surrounding fluid, thus improving the limit-of-detection of mass-sensitive biochemical sensors. Elementary theory is also presented to help explain the observed trends. Additional discussion focuses on the tradeoffs that exist in designing liquid-phase biochemical sensors using in-plane cantilevers. (C) 2012 Elsevier B.V. All rights reserved.

【 授权许可】

Free