Nanochip: a MEMS-Based Ultra-High Data Density Memory Device

Sensors & Transducers

卷:7

Qing MA¹  John HECK¹  Byong KIM¹  Valluri RAO¹  Тsung-Kuan CHOU¹  Gordon KNIGHT²  Robert STARK²  Nickolai BELOV²  Donald ADAMS²  Jong-Seung PARK²  Ghassan TCHELEPI² 

[1] Intel Corporation, 2200 Mission Blvd., Santa Clara, 95054, USA;

[2] Nanochip Inc., 48041 Fremont Blvd., 94538. USA;

关键词: Probe storage;    CMOS-MEMS integration;    Micro-mover;    Cantilevers;    Electromagnetic actuator;    Electrostatic actuator;   

DOI  :  

来源: DOAJ

【 摘 要 】

he paper provides an overview of successful development of MEMS micro-mover with large range of motion and an array of cantilevers with sharp tips (read-write heads) for a probe storage device. Approaches used for integration of memory material into the MEMS process and integration of MEMS cantilever process with CMOS are briefly discussed.

【 授权许可】

Unknown