Improved semiconducting CuO/CuFe2O4 nanostructured thin films for CO2 gas sensing

SENSORS AND ACTUATORS B-CHEMICAL

卷:204

Article

Chapelle, A.¹  El Younsi, I.¹  Vitale, S.^2,3  Thimont, Y.¹  Nelis, Th.²  Presmanes, L.¹  Barnabe, A.¹  Tailhades, Ph.¹ 

[1] Univ Toulouse 3, Inst Carnot CIRIMAT UMR CNRS 5085, F-31062 Toulouse 9, France

[2] Bern Univ Appl Sci Engn & Informat Technol, CH-2501 Biel, Switzerland

[3] Univ Catania, Dipartimento Sci Chim, I-95125 Catania, Italy

关键词: CO2 sensor;    Bi-layer;    p-n junction;    CuO;    CuFe2O4;    Nanocomposite;    Sputtering;    Thin films;   

DOI  :  10.1016/j.snb.2014.07.088

来源: Elsevier

【 摘 要 】

Promosing results on the behavior of CuO/CuFe2O4 sputtered thin films as a sensing material under carbon dioxide atmospheres are presented in this article. More specifically, we report the effects of preparation parameters and microstructure of the sensing layer on the response to CO2. FEG-SEM images and XPS measurements revealed the two-stacked layers rearrangement of samples after air annealing as a key parameter in gas sensing test. The influence of the sensing layer thickness and the influence of Ag as an additive in the film on the response are also reported. The best response was obtained at the optimal operating temperature of 250 degrees C with a thin film deposited under low argon pressure and low target-to-substrate distance, reaching 40% towards 5000 ppm of CO2. (C) 2014 Elsevier B.V. All rights reserved.

【 授权许可】

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