A CMOS-MEMS cantilever sensor for capnometric applications

IEICE Electronics Express

N. H. Hamid¹  Asif Mirza¹  J. O. Dennis²  Mohammad Tariq Jan¹  Muhammad Shoaib¹  M. H. Md. Khir¹  Khalid Ashraf¹ 

[1] Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS;Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS

关键词: capnometers;    CMOS-MEMS;    CO2 sensor;    quality factor;    microcantilever;   

DOI  :  10.1587/elex.11.20140113

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(11)Cited-By(3)Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively.

【 授权许可】

Unknown