Low-cost SERS substrates composed of hybrid nanoskittles for a highly sensitive sensing of chemical molecules

SENSORS AND ACTUATORS B-CHEMICAL

卷:239

Article

Bryche, Jean-Francois^1,2  Belier, Benoit¹  Bartenlian, Bernard¹  Barbillon, Gregory¹ 

[1] Univ Paris Saclay, Univ Paris Sud, Ctr Nanosci & Nanotechnol, CNRS,Orsay C2N, F-91405 Orsay, France

[2] Univ Paris Saclay, Lab Charles Fabry, CNRS, Inst Opt,Grad Sch, F-91227 Palaiseau, France

关键词: SERS;    Sensors;    Gold;    Silicona;   

DOI  :  10.1016/j.snb.2016.08.049

来源: Elsevier

【 摘 要 】

In this paper, we report on the low-cost and quick fabrication at the 4-in. wafer-scale of hybrid nanoskittles for a highly sensitive detection of chemical molecules. This quick and low-cost fabrication is achieved by using the native oxide layer as a physical etch mask coupled to an evaporation of a gold layer. The hybrid nanoskittles obtained with this technique are disordered on the 4-in. wafer of Si, and a good definition of nanoskittles and a good reproducibility of SERS signal are obtained on the whole wafer. Moreover, we studied experimentally the sensitivity of these Au/Si nanoskittles for SERS sensing. Finally, enhancement factors in the range of 10(7) 1.1 x 10(8) were found for the detection of thiophenol molecules with hybrid nanoskittles. (C) 2016 Elsevier B.V. All rights reserved.

【 授权许可】

Free