A compact refractometric sensor based on grated silicon photonic wires

SENSORS AND ACTUATORS B-CHEMICAL

卷:139

Article; Proceedings Paper

Kauppinen, L. J.¹ 

[1] Univ Twente, Fac Elect Engn Math & Comp Sci, Integrated Opt MicroSyst Grp, Res Inst Nanotechnol,MESA, NL-7500 AE Enschede, Netherlands

关键词: Grating;    Waveguide;    Sensor;    Silicon;    Photonic wire;   

DOI  :  10.1016/j.snb.2008.12.023

来源: Elsevier

【 摘 要 】

Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180 mu m has an index sensitivity of 10(-6) assuming a detector power resolution of 1%. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions. (C) 2008 Elsevier B.V. All rights reserved.

【 授权许可】

Free