A Biaxial Strain Sensor Using a Single MoS2 Grating

Nanoscale Research Letters

Bin Xiang¹  Ping Liu¹  Junxiang Xiang¹  Meng Huang¹  Chao Feng²  XiFeng Ren³  Lantian Feng³  Wenhui Wang⁴ 

[1] Hefei National Research Center for Physical Sciences at the Microscale, Department of Materials Science and Engineering, CAS Key Lab of Materials for Energy Conversion, University of Science and Technology of China, 230026, Hefei, Anhui, China;Hefei National Research Center for Physical Sciences at the Microscale, Department of Materials Science and Engineering, CAS Key Lab of Materials for Energy Conversion, University of Science and Technology of China, 230026, Hefei, Anhui, China;Shandong Provincial Key Laboratory of Preparation and Measurement of Building Materials, University of Jinan, 250022, Jinan, China;Key Laboratory of Quantum Information, University of Science and Technology of China, Chinese Academy of Sciences, 230026, Hefei, China;Research Laboratory for Quantum Materials, Singapore University of Technology and Design, 487372, Singapore, Singapore;

关键词: Biaxial strain;    Grating;    Reflectance;    MoS;    First principles;   

DOI  :  10.1186/s11671-021-03493-3

来源: Springer

【 摘 要 】

In this paper, we report a new type of MoS2-based grating sensor for in-plane biaxial strain gauges with a precision limit of ~ 1‰. The MoS2 grating is numerically simulated with different biaxial strains up to 5%. Our first-principles calculations reveal that the strain sensitivity of the MoS2 reflectance spectrum can be considered an additional strain sensor integrated with the grating structure, enabling the mapping of in-plane biaxial strains. Our experimental studies on a prototype MoS2-grating sensor further confirm that a strain component perpendicular to the grating period can cause intensity peak shifts in the grating’s first-order diffraction patterns. This work opens a new path towards the sensing of in-plane biaxial strain within a single-grating device. Our new approach is applicable for other materials that have predictable reflectance response under biaxial strains and the capacity to form a two-dimensional single-crystal layer.

【 授权许可】

CC BY