Mems mixer as an example of a novel construction method of microfluidics by discrete microparts

SENSORS AND ACTUATORS B-CHEMICAL

卷:194

Article; Proceedings Paper

Murakami, Y.^1,2  Araki, K.¹  Ohashi, R.¹  Honma, H.¹  Misawa, N.³  Takahashi, K.¹  Sawada, K.¹  Ishida, M.¹ 

[1] Toyohashi Univ Technol, Dept Elect & Elect Informat Engn, Toyohashi, Aichi 4418580, Japan

[2] JST, CREST, Kawaguchi, Saitama, Japan

[3] Toyohashi Univ Technol, Elect Inspired Interdisciplinary Res Inst, Toyohashi, Aichi 4418580, Japan

关键词: Micromixer;    Microreactor;    mu TAS;    Microfluidics;   

DOI  :  10.1016/j.snb.2013.12.100

来源: Elsevier

【 摘 要 】

This paper describes a novel approach to construct and/or functionalize a microfluidic chip with discrete microparts that are microfabricated small enough to place them in a microchannel. A preliminary demonstration was shown as a passive mixer. Microparts of several hundred micrometers were fabricated by double-sided etching with ICP RIE. The parts were manually placed in a typical Y-shaped PDMS microchannel. Fluorescence observation revealed that the constructed microfluidics had the same mixing ability as a fully silicon MEMS mixer. The configuration that is unattainable by the normal preassembled structure can also be fabricated. (C) 2014 Elsevier B.V. All rights reserved.

【 授权许可】

Free