A microsensor array for biochemical sensing

SENSORS AND ACTUATORS B-CHEMICAL

卷:44

Article; Proceedings Paper

Van Steenkiste, F ; Baert, K ; Debruyker, D ; Spiering, V ; van der Schoot, B ; Arquint, P ; Born, R ; Schumann, K

关键词: microsensor array;    hybrid;    integration method;    biological liquids;   

DOI  :  10.1016/S0925-4005(97)00234-7

来源: Elsevier

【 摘 要 】

A microsensor array to measure chemical properties of biological liquids is presented. A hybrid integration technique is used to mount four sensor chips on a micro flow channel: a pressure, temperature, pH, combined pO(2) and pCO(2) sensor chip. This results in a microsensor array which is developed to meet the technical requirements for space applications, The integration method allows to integrate other types of sensor chips, This multi-purpose and multi-user approach makes the microsensor array suitable for various biochemical applications. (C) 1997 Published by Elsevier Science S.A.

【 授权许可】

Free