Transformation of amorphous TiO2 to a hydronium oxofluorotitanate and applications as an HF sensor

SENSORS AND ACTUATORS B-CHEMICAL

卷:228

Article

Appelhans, Leah N.¹  Finnegan, Patrick S.¹  Massey, Lee T.¹  Luk, Ting S.^1,2  Rodriguez, Mark A.¹  Brumbach, Michael T.¹  McKenzie, Bonnie¹  Craven, Julia M.¹ 

[1] Sandia Natl Labs, POB 5800,Mail Stop 0888, Albuquerque, NM 87185 USA

[2] Sandia Natl Labs, Ctr Integrated Nanotechnol CINT SNL, POB 5800, Albuquerque, NM 87185 USA

关键词: Hydrofluoric acid;    Titania;    Oxyfluoride;    HF sensor;    Polarimetry;   

DOI  :  10.1016/j.snb.2015.12.068

来源: Elsevier

【 摘 要 】

Amorphous titania thin films were examined for use as the active material in a polarimetry based HF sensor. The amorphous titania films were found to be sensitive to vapor phase HF and the reaction product was identified as a hydronium oxofluorotitanate phase, which has previously only been synthesized in aqueous solution. The extent of reaction varied both with vapor phase HF concentration, relative humidity, and the exposure time. HF concentrations as low as 1 ppm could be detected for exposure times of 120 h. (C) 2016 Elsevier B.V. All rights reserved.

【 授权许可】

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