A composite strategy for high-quality and high-efficiency milling of alumina ceramic via femtosecond laser burst-mode

卷:125

Article

关键词: MICRO-CHANNELS;    ABLATION;    FABRICATION;    METALS;   

DOI  :  10.1007/s00170-023-10938-9

来源: SCIE

【 摘 要 】

Industrial alumina ceramics require high surface accuracy when assembled to critical components of devices, for which high-quality milling has become an integral process. To achieve high-quality milling of alumina ceramics efficiently, this paper introduced a composite strategy based on the sequence of roughing and finishing via the femtosecond laser burst-mode. Firstly, the effects of laser parameters in the single-pulse mode such as energy fluence, spot overlap ratio, and scanning spacing on the milling quality and efficiency of alumina ceramics were investigated to provide a basis of the parameter selection for the subsequent composite strategy study. Then, the influence of the burst-mode on the optimization of the milling results was discussed, and the advantages of this mode over the single-pulse mode were revealed. Finally, a comparative investigation on the processing performance between the composite strategy and the single strategy was carried out. The results showed that milling the same structure, the roughness of the groove was reduced by 10.69% compared to the optimal processing results in a single process. At the same time, the processing efficiency was maximized with an increase of 49.91%.

【 授权许可】

Free