Tailoring Black TiO 2 Thin Films: Insights from Hollow Cathode Hydrogen Plasma Treatment Duration

Plasma

article

Armstrong Godoy-Junior¹  André Pereira¹  Barbara Damasceno¹  Isabela Horta¹  Marcilene Gomes²  Douglas Leite¹  Walter Miyakawa³  Maurício Baldan⁴  Marcos Massi⁵  Rodrigo Pessoa¹  Argemiro da Silva Sobrinho¹ 

[1] Laboratório de Plasmas e Processos ,(LPP), Instituto Tecnológico de Aeronáutica;Instituto Federal de Educação;Instituto de Estudos Avançados;Instituto Nacional de Pesquisas Espaciais;Escola de Engenharia, Universidade Presbiteriana Mackenzie

关键词: black TiO2;    hollow cathode;    hydrogen plasma;    hydrogenation;    photocatalysis;   

DOI  :  10.3390/plasma6020025

学科分类：泌尿医学

来源: mdpi

【 摘 要 】

In this study, we report the use of a radiofrequency plasma-assisted chemical vapor deposition (RF-CVD) system with a hollow cathode geometry to hydrogenate anatase TiO2 thin films. The goal was to create black TiO2 films with improved light absorption capabilities. The initial TiO2 was developed through magnetron sputtering, and this study specifically investigated the impact of hollow cathode hydrogen plasma (HCHP) treatment duration on the crucial characteristics of the resulting black TiO2 films. The HCHP treatment effectively created in-bandgap states in the TiO2 structure, leading to enhanced light absorption and improved conductivity. Morphological analysis showed a 24% surface area increase after 15 min of treatment. Wettability and surface energy results displayed nonlinear behavior, highlighting the influence of morphology on hydrophilicity improvement. The anatase TiO2 phase remained consistent, as confirmed by diffractograms. Raman analysis revealed structural alterations and induced lattice defects. Treated samples exhibited outstanding photodegradation performance, removing over 45% of methylene blue dye compared to ~25% by the pristine TiO2 film. The study emphasized the significant impact of 15-min hydrogenation on the HCHP treatment. The research provided valuable insights into the role of hydrogenation time using the HCHP treatment route on anatase TiO2 thin films and demonstrated the potential of the produced black TiO2 thin films for photocatalytic applications.

【 授权许可】

CC BY